Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003 /

Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003 /

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Bibliographic Details
Corporate Authors: International Conference on Characterization and Metrology for ULSI Technology Austin, Tex., National Institute of Standards and Technology (U.S.)
Other Authors: Seiler, David G
Format: Conference Proceeding Book
Language:English
Published: Melville, N.Y. : American Institute of Physics, 2003
Melville, N.Y. : 2003
Series:AIP conference proceedings ; no. 683
AIP conference proceedings ; v. 683
Subjects:
Integrated circuits > Ultra large scale integration > Congresses > Software
Integrated circuits > Ultra large scale integration > Congresses
Circuits intégrés à ultra-grande échelle > Congrès
Integrated circuits > Ultra large scale integration
Electronic books
Conference papers and proceedings
Software

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Massachusetts Institute of Technology

Holdings details from Massachusetts Institute of Technology
Call Number: CDROM TK7874.76.C48 2003
TK7874.76.C48 2003

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