Journal of vacuum science & technology processing, measurement, and phenomena : an official journal of the American Vacuum Society.

Journal of vacuum science & technology processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures :

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Bibliographic Details
New Title:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Previous Title:	Journal of vacuum science & technology. B, Microelectronics processing and phenomena Journal of vacuum science & technology. B, Microelectronics
Corporate Authors:	American Institute of Physics, American Vacuum Society
Format:	Journal
Language:	English
Published:	New York : Published for the Society by the American Institute of Physics, c1991-c2010 New York : Published for the American Vacuum Society by the American Institute of Physics, ©1991-©2010 Woodbury, NY : c1991-c2010
Subjects:	Microelectronics > Periodicals Nanoparticles > Measurement > Periodicals Nanostructured materials > Periodicals Vacuum microelectronics > Periodicals Vacuum technology > Periodicals Matériaux nanocristallins > Périodiques Matériaux nanocristallins > Périodiques Microélectronique > Périodiques Microélectronique > Périodiques Vide (Technologie) > Périodiques Vide (Technologie) > Périodiques Measurement Microelectronics Nanoparticles Nanostructured materials Vacuum microelectronics Periodicals

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Princeton University

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Call Number:	TJ940 .J669

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Call Number:	TJ940 .J673