Micro- and nanopatterning polymers /

Micro- and nanopatterning polymers /

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Bibliographic Details
Corporate Authors:	American Chemical Society Division of Polymeric Materials: Science and Engineering (sponsoring body.), American Chemical Society Meeting
Other Authors:	Ito, Hiroshi (Editor), Nalamasu, Omkaram, 1958- (Editor), Reichmanis, Elsa, 1953- (Editor), Ueno, Takumi, 1951- (Editor)
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1998
Series:	ACS symposium series ; 706
Subjects:	Acids > Diffusion rate Addition polymerization Bicyclic compounds > Utilization Block copolymers Calixarenes > Utilization > Research Crosslinked polymers > Utilization Dendrimers > Utilization > Research Diazo compounds > Utilization Diblock copolymers > Utilization Electron beams > Utilization Excimer lasers > Utilization > Evaluation Excimer lasers > Utilization Extreme ultraviolet lithography > Materials > Design Lithography > Effect of chemicals on Lithography Macromolecules > Synthesis > Technological innovations Metallizing > Methodology Microelectronics > Materials > Production > Industrial applications Microelectronics > Materials Microlithography Molding (Chemical technology) > Industrial applications Nanolithography Nanostructures Organic conductors > Design Photolithography Photoresists > Adhesion Photoresists > Design > Technological innovations Photoresists > Effect of radiation on Photoresists > Materials Photoresists > Molecular aspects > Research Photoresists > Stability > Research Photoresists > Synthesis > Methodology Photoresists > Technological innovations Polyimides > Utilization Polymeric composites Polytef > Utilization Thin films > Synthesis > Methodology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Textiles & Polymers Acids Bridged Bicyclo Compounds Calixarenes Chemical Engineering Dendrimers Diffusion Electronics Electrons Imides Inventions Lasers, Excimer Macromolecular Substances > chemical synthesis Metals Nanotechnology Nitrogen Compounds Organometallic Compounds Plastics Polymerization Polymers Polytetrafluoroethylene Printing Radiation Effects Surface Properties Ultraviolet Rays Research

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