Semiconductor Manufacturing Technology Workshop : Mar. 22-26, 1993, Hsinchu, Taiwan, R.O.C. /

Semiconductor Manufacturing Technology Workshop : Mar. 22-26, 1993, Hsinchu, Taiwan, R.O.C. /

Bibliographic Details
Corporate Authors:	Semiconductor Manufacturing Technology Workshop Hsinchu, Taiwan, Gong ye ji shu yan jiu yuan, Guo li Taiwan da xue Department of Electrical Engineering, Guo li Taiwan da xue Dept. of Electrical Engineering, IEEE Control Systems Society, IEEE Electron Devices Society
Other Authors:	Lee, Si-Chen, Lu, C. Y
Format:	Conference Proceeding Book
Language:	English Chinese
Published:	[Hsinchu, Taiwan? : ERSO, ITRI?, 1993?] [Hsinchu, Taiwan?] : [ERSO, ITRI?], [1993?]
Subjects:	Microelectronics > Research > Congresses Miniature electronic equipment > Congresses Process control > Congresses Production control > Congresses Research, Industrial > Laboratories > Management > Congresses Semiconductor industry > Congresses Semiconductor storage devices > Congresses Semiconductors > Design and construction > Congresses Microelectronics > Research Miniature electronic equipment Process control Production control Research, Industrial > Laboratories Research, Industrial > Laboratories > Management Semiconductor industry Semiconductor storage devices Semiconductors > Design and construction Conference papers and proceedings

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Yale University

Holdings details from Yale University
Call Number:	TK7871.85 S42943 1993 (LC)+

Massachusetts Institute of Technology

Holdings details from Massachusetts Institute of Technology
Call Number:	HD9696.S4.S46 1993

Columbia University

Holdings details from Columbia University
Call Number:	TK7836 .S46 1993g