Laser Heat-Mode Lithography : Principle and Methods /
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applicati...
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| Format: | Book |
| Language: | English |
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Singapore :
Springer Singapore : Imprint: Springer,
2019
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| Edition: | 1st ed. 2019 |
| Series: | Physics and Astronomy (Springer-11651)
Springer Series in Materials Science, 291 Springer series in materials science 291 |
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