Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands /

Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands /

Show other versions (1)
Bibliographic Details
Corporate Authors: Association nationale de la recherche technique, Comité belge d'optique, Comité belge d'optique, Society of Photo-Optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers, International Symposium on Optical and Optoelectronic Applied Sciences and Engineering
Other Authors: Stover, Harry L, Wittekoek, Steven
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987
Bellingham, Wash., USA : SPIE-the International Society for Optical Engineering, c1987
Bellingham, Wash., USA : c1987
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 811
Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 811
Subjects:
Integrated circuits industry > Congresses
Integrated circuits > Congresses
Integrated circuits > Design and construction > Congresses
Microlithography > Congresses
Integrated circuits
Integrated circuits > Design and construction
Microlithography
Conference papers and proceedings

Internet

Stanford University

Holdings details from Stanford University
Call Number: TA1505 .P76 V.811

Massachusetts Institute of Technology

Holdings details from Massachusetts Institute of Technology
Call Number: TK7874.O68 1987

Duke University

Holdings details from Duke University
Call Number: TK7874 .O685 1987

Cornell University

Holdings details from Cornell University
Call Number: TK7874 .O62 1987

Princeton University

Holdings details from Princeton University
Call Number: TK7874 .O66 1987

Columbia University

Holdings details from Columbia University
Call Number: TK8784 .O7 1987g

Similar Items