Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

Bibliographic Details
Main Author: Potzick, James E
Corporate Author: National Institute of Standards and Technology (U.S.)
Format: Government Document Book
Language:English
Published: Gaithersburg, MD : Washington : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1997
Series:NIST special publication ; 260-129
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Duke University

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Call Number: C 13.10:260-129