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Block copolymers and ion beam...
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Block copolymers and ion beam analysis in lithography /
Bibliographic Details
Main Author:
Sundararajan, Narayanan
Format:
Thesis
Book
Language:
English
Published:
c1999
Subjects:
Block copolymers
Integrated circuits
>
Design and construction
>
Technological innovations
Ion beam lithography
Photoresists
Academic theses
Holdings
Description
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Cornell University
Holdings details from Cornell University
Call Number:
Thesis 1999 S863
Thesis TX295 1999 S863
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