The Journal of vacuum science and technology

The Journal of Vacuum Science and Technology (JVST) is the official publication of the AVS containing original research papers, brief reports and comments, shop notes, review articles and critical reviews. Fields of particular interest include electronic materials and processes, fusion technology, s...

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Bibliographic Details
New Title:Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
Journal of vacuum science & technology. B, Microelectronic processing and phenomena
Journal of vacuum science & technology. B. Microelectronic processing and phenomena
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Previous Title:Vacuum Metallurgy Conference Transactions
Vacuum Metallurgy Conference Transactions.
Corporate Authors: American Institute of Physics, American Vacuum Society
Format: Journal
Language:English
Published: New York : American Institute of Physics, 1964-1982
New York, American Institute of Physics
New York,
Subjects:

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University of Chicago

Holdings details from University of Chicago
Call Number: QC166.J86

Johns Hopkins University

Holdings details from Johns Hopkins University
Call Number: QC 166 .J65

Cornell University

Holdings details from Cornell University
Call Number: QC166.A1 J86

Brown University

Holdings details from Brown University
Call Number: 1-SIZE TJ940 .J67