Development of a quadrupole-based secondary-ion mass spectrometry (SIMS) system at Lewis Research Center /

Development of a quadrupole-based secondary-ion mass spectrometry (SIMS) system at Lewis Research Center /

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Bibliographic Details
Main Author: Vargas-Aburto, Carlos
Corporate Author: United States National Aeronautics and Space Administration
Other Authors: Aron, Paul R, Liff, Dale R (Dale Russell)
Format: Government Document Book
Language:English
Published: [Washington, D.C.] : [Springfield, Va. :] : NASA ; [For sale by the National Technical Information Service], [1990]
Series:NASA technical memorandum ; 102531
NASA technical memorandum 102531
Subjects:
Secondary ion mass spectrometry
High vacuum
Ion probes
Mass spectrometers
Mass spectroscopy
Numerical control
Quadrupoles
Vacuum chambers

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Stanford University

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Call Number: ISIL:US-CST
NAS 1.15:102531

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